Název:
Possibilites of a secondary electrons bandpass filter for standard SEM
Autoři:
Mika, Filip ; Pokorná, Zuzana ; Konvalina, Ivo ; Khursheed, A. Typ dokumentu: Příspěvky z konference Konference/Akce: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation, Skalský dvůr (CZ), 20180604
Rok:
2018
Jazyk:
eng
Abstrakt: Secondary electron filtering in Scanning Electron Microscope (SEM) has been in use for over\na decade. This technique uncovers interesting contrasts in an otherwise ordinary SEM image\nwhich can possibly be used for dopant concentration mapping or for discerning the slight molecular weight differences in apparently homogeneous organic materials. Secondary\nelectron filtering of semiconductor samples seems very promising as it may shed light on the mechanism of SEM image contrast between p-doped and n-doped semiconductors, possibly\nallowing to determine dopant concentration from SEM image alone.
Klíčová slova:
filtering; imaging; secondary electron Číslo projektu: LO1212 (CEP), ED0017/01/01 Poskytovatel projektu: GA MŠk, GA MŠk Zdrojový dokument: Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Proceedings of the 16th International Seminar, ISBN 978-80-87441-23-7
Instituce: Ústav přístrojové techniky AV ČR
(web)
Informace o dostupnosti dokumentu:
Dokument je dostupný v příslušném ústavu Akademie věd ČR. Původní záznam: http://hdl.handle.net/11104/0288493